Product Details
-
Resolution
25nm
-
Positioning Accuracy
±25nm
-
Angle Axis
±0.003°
- 3D high-speed high-precision linear motor stages plus 3D electric angular stages.
- High-precision electric vacuum gripper with force feedback enables stable precision clamping of FA.
- FA adsorption loading platform for damage-free feeding.
- Top-view camera automatically recognizes chip position with visual coupling and dispensing.
Application Fields
-
optical fiber communication
-
fiber optic sensing
-
High power laser
-
Laser projection
